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90 nm |
Also found in: Wikipedia | 0.04 sec. |
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See process technology. |
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? Mentioned in | ? References in periodicals archive | |
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Currently, the industry uses 193-nanometer-wave-length laser radiation
to make wires and other circuit parts as thin as 90 nm. SAXS measurements were performed at the Advanced Photon Source at
Argonne National Laboratory on test arrays of lithographically prepared
structures with dimensions spanning 90 nm to 300 nm with a precision on
the order of 0. The 90 nm process will be ramped into high volume in Intel's
300 mm development fab in Hillsboro, Oregon, and then transferred to
Ireland and other 300mm manufacturing fabs sometime next year. |
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