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barrier layer |
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| The IKV's new double-sided coating system applies a 20- to 150-nm barrier layer to both the interior and exterior of PET bottles. Inner barrier layer to perform the function of fuel containment; Process Technology for Copper Interconnect Process Equipment Polyimide coating Spin coater PI exposure and develop 1X stepper Barrier layer Sputter Copper seed layer Sputter Resist coating Spin coater Resist patterning 1X stepper Copper wire Electroplater Ni cap layer Electroplater Resist strip Resist stripper Metal self-align etch Wet etch Source: Megic Corp. |
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