Printer Friendly
Dictionary, Encyclopedia and Thesaurus - The Free Dictionary
3,901,431,966 visitors served.
forum Join the Word of the Day Mailing List For webmasters
?
Dictionary/
thesaurus
Medical
dictionary
Legal
dictionary
Financial
dictionary
Acronyms
 
Idioms
Encyclopedia
Wikipedia
encyclopedia
?

bulk micromachining

   Also found in: Wikipedia 0.01 sec.
bulk micromachining [¦bəlk ‚mī·krō·mə′shēn·iŋ]
(engineering)
A set of processes that enable the three-dimensional sculpting of single-crystal silicon to make small structures that serve as components of microsensors.
Want to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit the webmaster's page for free fun content.
?Page tools
Printer friendly
Cite / link 		Feedback
Mentioned in?  References in periodicals archive?   Encyclopedia browser?   Full browser?
No references found
 
Coverage includes discussion of the electrical, structural, fluidic, transport, and control aspects of MEMS; materials; micromolding; fabrication, characterization, and reliability of single-crystal silicon carbide MEMS; ion etching for bulk micromachining of silicon carbide; polymer microsystems; optical diagnostics; aerospace applications; packaging of harsh environment MEMS devices; and molecular self-assembly.
The MEMS handbook, 2d ed.; 3v by SciTech Book News
Until now, microcalorimeters always have been fabricated using bulk micromachining techniques where thermal isolation of the detector is achieved by removing the Si substrate from behind the detector, leaving the detector supported by only a thin membrane of silicon nitride.
NIST researchers develop microcalorimeter arrays using surface ... by Journal of Research of the National Institute of Standards and Technology
Bulk micromachining designates the technique in which the bulk of the silicon substrate is etched away to leave behind desired micromechanical elements.
MEMS and Micromachining in the New Millennium: Biomedical ... by Roy, Shuvo; Fleischman, Aaron / Designfax
 
 
 
Encyclopedia
?

Terms of Use | Privacy policy | Feedback | Advertise with Us | Copyright © 2012 Farlex, Inc.
Disclaimer
All content on this website, including dictionary, thesaurus, literature, geography, and other reference data is for informational purposes only. This information should not be considered complete, up to date, and is not intended to be used in place of a visit, consultation, or advice of a legal, medical, or any other professional.