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bulk micromachining |
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bulk micromachining [¦bəlk ‚mī·krō·mə′shēn·iŋ] (engineering) A set of processes that enable the three-dimensional sculpting of single-crystal silicon to make small structures that serve as components of microsensors. How to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit webmaster's page for free fun content. |
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Until now, microcalorimeters always have been fabricated using bulk micromachining techniques where thermal isolation of the detector is achieved by removing the Si substrate from behind the detector, leaving the detector supported by only a thin membrane of silicon nitride. |
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