DUV


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DUV

(communications)
References in periodicals archive ?
Lot 14 - DUV reticle ASM5500 4X / 5X 300 + reticles for ASM100,
Lot 15 - 4X ASM5500 DUV reticle / crosshairs 300 + 5X + for 1X masks ASM100 - 9 inches,
Lot 16 - DUV reticle ASM5500 4X / 5X reticle 300 + for 1X masks ASM100 + - + 9 inches DUV reticle ASM5500 4X / 1100
The new Saturn DUV lamp subsystem will be displayed at the Energetiq booth, T15, in the Moscone Center West Hall Level 2 at SEMICON West, July 17-19, 2007.
The installation of our 200th laser in Japan reflects the continued strength of Cymer's DUV light source solutions in this region," noted Pascal Didier, president of Cymer Japan and corporate senior vice president of worldwide customer operations.
Revisiting F2 Laser for DUV Microlithography" details Cymer's technology innovations from its 157 nm fluorine molecular laser program.
The office will provide local training for the company's customer base in this key region, which is one of the largest users of DUV steppers and scanners.
Reflecting Cymer's continuous commitment to support its growing installed base of DUV lasers, this new center will provide comprehensive excimer laser training in the Korean language to both chipmakers and DUV equipment manufacturers.
With the establishment of this center, our customers can learn how to optimize the performance and process capability of both our excimer lasers and their DUV photolithography systems to produce faster, smaller, higher performance chips," said Pascal Didier, Cymer's senior vice president of worldwide customer operations.
The company selected the Olympus systems to take advantage of Olympus's broad capabilities and flexible high resolution DUV platforms.
The purchase includes multiple units of both the AL3100 inspection and review station and FR3200 DUV automated defect review station.
The FR3200 is an automated defect review station that provides visible and DUV imaging with resolution to 80 nanometers.