In the meantime, contributors of these 61 papers and other materials describe international cooperation and overall progress in fusion research, results of plasma-focus experiments and dense plasma focus
, numerical simulations and burning plasma concepts, antimatter-initiated microfission/fusion, studies of fast particles using pellet charge exchange diagnostics, plans for the National Ignition Facility, physics results and prospects of the National Spherical Torus Experiment, fusion at the Los Alamos National Laboratory, Z-pinch experiments, laser fusion in China, and fast ignition.
The first significant external subsidy of Cymer's patented dense plasma focus
(DPF) EUV source technology, the chipmaker's funding offers compelling, tangible evidence of its confidence in DPF as a viable path for powering lithography tools in the post-optical era.
The MS-13 EUV Microstepper, which will be installed at ISMT during the fourth quarter of 2003, will incorporate a dense plasma focus
discharge source developed by Cymer (San Diego, Calif.
The symposium emphasized the latest developments in light source technology, including a presentation on Cymer's fourth-generation extreme ultraviolet (EUV) technology design based on dense plasma focus
, which was delivered by Dr.
This dense plasma focus
(DPF) device produces narrow-band radiation at 13.
5nm) Light Generation Using a Dense Plasma Focus
Device" unveils Cymer's newest prototype, a patented dense plasma focus
(DPF) device that produces narrow-band radiation at 13.
Additionally, the system will employ a dense plasma focus
technique to generate X-Rays that can create circuits with very small dimensions -- less than 0.