ESML

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ESML - Extended Systems Modelling Language: a real-time software engineering methodology based on RTSA.

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With its ESML measurement capability, the new SUMMIT software allows Tencor's measurement systems to calculate two film thicknesses, such as oxide and TiN, in roughly the same amount of time it takes to measure a single film thickness, or three film thicknesses, such as oxide-on-poly-on-oxide, in about the same length of time required for two thicknesses.

Tencor Instruments Introduces Enhanced Software Interface for Its ... by Business Wire

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