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End Of Line |
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The advantages of adopting these machines and automating the end of line process are numerous. This work revealed trench T-10 (located at the north end of Line 5800 E) contains 3. This system provides extraordinary precision for a variety of wafer fabrication steps including Front End of Line (FEOL) critical cleans and etches, Back End of Line (BEOL) cleans, and specialized applications to address unique issues facing fabs processing wafers at and below the 65nm node. |
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