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Faraday shield |
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Faraday shield [′far·ə‚dā ‚shēld] (electricity) Electrostatic shield composed of wire mesh or a series of parallel wires, usually connected at one end to another conductor which is grounded. Also known as Faraday cage; Faraday screen. How to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit webmaster's page for free fun content. |
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Specifically addressing customer requirements for controlling charge damage, contamination drive-in, and residue removal while maintaining extremely high strip rates, ICP technology uses an electrostatic Faraday shield to eliminate capacitively coupled power and control electron energy distribution in the plasma. |
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