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helium-3 |
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helium-3 [′hē·lē·əm ′thrē] (nuclear physics) The isotope of helium with mass number 3, constituting approximately 1.3 parts per million of naturally occurring helium. How to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit webmaster's page for free fun content. |
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| nbsp;Ultra and HE3 systems support leading foundry's 300mm The customer has also purchased Axcelis' HC3 Ultra, a low energy, high current tool for 300mm manufacturing, as well as Axcelis' HE3 ion implanter, which uses higher energies to produce well and channel implants in 300mm wafer production. NASDAQ: ACLS), today marked the shipment of its 300th HE ion implant product with the sale of an HE3 300mm implanter to Samsung Electronics Co. |
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