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High-K/Metal Gate

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High-K/Metal Gate
The technology in an Intel chip that enabled the fabrication of 45 nm microprocessors in 2007. As elements in the chip were being reduced to 45 nanometers, the gate dielectric began to lose its insulating (dielectric) quality and exhibited too much leakage. The gate dielectric is a very thin insulation layer, traditionally made of silicon dioxide, that lies between the transistor's metal gate electrode and the channel through which the current flows.

Intel's solution to the problem was to combine a hafnium-based dielectric layer, instead of silicon dioxide, with a gate electrode composed of alternative metal materials. The resulting combination yields a "high dielectric constant," otherwise known as a "high-K." See transistor.



Electrode and Dielectric
When the gate is pulsed, current flows between the source and drain. Intel's High-K/Metal Gate technology enabled elements on a chip to be reduced to 45 nm with stability. SiGe stands for silicon germanium. (Bottom image courtesy of Intel Corporation.)


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The next section covers gate-stack engineering, with most papers focusing on atomic-layer deposition-grown high-k/metal gate stacks, although several address the recent implementation of high-k/metal gate CMOS in volume manufacturing.
: The Impact of La-Doping on the Reliability of Low Vth High-k/Metal Gate nMOSFETs Under Various Gate Stress Conditions - reports results of a comprehensive reliability study for La-doped HfSiO dielectrics using PBTI, TDDB and flicker noise.
The papers outlined SEMATECH's leading-edge research related to high-k/metal gate (HKMG) materials and planar and non-planar CMOS technologies, including: * Performance and Reliability of High-k/Metal Gate Stacks: Interfacial Layer Defects - examines high-pressure oxygen anneal (HPOA) and high-pressure hydrogen anneal (HPHA) processes applied to MOSFETs with metal electrode/high-k dielectric stacks.
 
 
 
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