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High-K |
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See High-K/Metal Gate. How to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit webmaster's page for free fun content. |
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? Mentioned in | ? References in periodicals archive | |
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1) A high-k dielectric for transistor threshold control IEEE SCV-EDS(1) will host a full-day technical symposium with distinguished technologists and researchers from the world's leading semiconductor companies and universities to discuss the transition to new high-k dielectric materials and metal gates for next-generation transistors. In both high-k dielectric and metal gate etch, Hitachi is having great success etching these materials with no chamber wall residue to cause defects. |
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