MEMS


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MEMS

[memz or ¦em¦ē¦em′es]

MEMS

MEMS

(MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. They are used to make pressure, temperature, chemical and vibration sensors, light reflectors and switches, as well as accelerometers for vehicle airbags, smartphones, tablets and games (see accelerometer).

MEMS technology is also used to make inkjet print heads, microactuators for read/write heads and all-optical switches that reflect light beams to the appropriate output port.

MEMS and MOEMS
When optical components are included in a MEMS device, it is called a micro-opto-electromechanical system (MOEMS). For example, adding a photonic sensor to a silicon chip constitutes a MOEMS device. See micromachine, MEMS mirror, DLP and optical switch.

MEMS Vs. Nanotechnology
Sometimes MEMS and nanotechnology are terms that are used interchangeably, because they both deal with microminiaturized objects. However, they are vastly different. MEMS deals with creating devices that are measured in micrometers, whereas nantotechnology deals with manipulating atoms at the nanometer level.


MEMS-based Optical Switch
In an all-optical switch, MEMS mirrors reflect the input signal to an output port without regard to line speed or protocol. This technology is expected to be the dominant method for building photonic switches.







Sample Micromachines
Microfabrica's EFAB system was the first MEMS foundry process to accept CAD files as input, turning customer designs into micromachines much faster than traditional methods. EFAB builds the devices one metal layer at a time. In this image, the square at the top is a microfluidics device with internal passageways used for a "lab on a chip." The multi-arm device (center) is a fuel injection nozzle. Bottom left is an accelerometer, and bottom right is an inductor used in RF circuits. (Image courtesy of Microfabrica Inc., www.microfabrica.com)








MEMS-Based Accelerometer
MEMSIC's dual-axis thermal accelerator is a MEMS-based semiconductor device that works conceptually like the air bubble in a construction level. The square in the middle of the chip is a resistor that heats up a gas bubble. The next larger squares contain thermal couples that sense the location of the heated bubble as the device is tilted or accelerated. (Image courtesy of MEMSIC, Inc.)
References in periodicals archive ?
IntelliSense Software is the leading supplier of solutions for the MEMS professional.
Presents a number of case studies exploring MEMS for harsh environment sensors in aerospace
MEMS Executive Congress is a unique professional forum at which executives from companies designing and manufacturing MEMS technology sit side-by-side with their end-user customers in panel discussions and networking events to exchange ideas and information about the use of MEMS in commercial applications.
Taking advantage of our MEMS knowledge to create breakthrough technology for telecommunications and other industries is an outgrowth of our core MEMS research for internal Xerox applications in digital printing," said Kubby.
Corning IntelliSense develops and manufactures advanced MEMS devices for many sectors, including the optical, RF, laboratory equipment, and life sciences industries.
Micro fuel cells have large market expectation as MEMS based microfuel cell market is expected to take about 25% of the global microfuel cell market.
Reviewing key players - several companies stopped their MEMS production entirely or in part (Delphi, Continental, Colibrys, Systron Donner Automotive) while others saw their businesses enter a huge growth phase (InvenSense, Kionix, STMicroelectronics, SiTime).
The two American auto giants are faced with bankruptcy, which has given a heavy blow to MEMS market application.
Detailed analysis of the evolution of MEMS in each major geographical areas
CROLLES, France, & RICHARDSON, Texas -- Tronics Microsystems SA, a global leader in custom MEMS components and microsystems for demanding applications, announced today the formation of Tronics MEMS, Inc.
com/reports/c50494) has announced the addition of Frost & Sullivan's new report: World MEMS Microphone Markets to their offering.