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microelectromechanical systems
(redirected from Micro Electro-Mechanical Systems)

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microelectromechanical systems

See MEMS.
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The tool will be used in fabrication of advanced Micro Electro-Mechanical Systems (MEMS) at TSC, Freescale's wafer fab in Sendai, Japan.
Semitool to Provide Vapor Etch System to Freescale; SEMITOOL HF Vapor ... by Business Wire
With the expansion of our technology base, through the recent acquisition and formation of our new Micro Electro-Mechanical Systems ("MEMS") division, we believe we are well positioned to receive Deloitte's prestigious award in 2005.
Apogee #1 in Deloitte's 2004 Ranking of Fastest Growing Technology ... by Business Wire
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