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microelectromechanical system

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microelectromechanical system (MEMS)

Miniature devices formed by combining mechanical parts and electronic circuits, typically on a semiconductor chip, with dimensions from tens to a few hundred micrometres (millionths of a metre). Common applications for MEMS include sensors, actuators, and process-control units.

(hardware)microelectromechanical system - (MEMS) The integration of mechanical structures (moving parts) with microelectronics. MEMS devices are "custom" designed for a purpose which requires a mechanical action to be controlled by a computer.

Applications include sensors, medical devices, process controls.

http://mems.mcnc.org/.

See also nanotechnology.


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The first microelectromechanical systems (MEMS) standards in the world will be published in the Annual Book of ASTM Standards this summer.
NIST writes first MEMS standards by Journal of Research of the National Institute of Standards and Technology
Department of Commerce's Advanced Technology Program (ATP) to develop embedded digital interface and control circuits for MicroElectroMechanical Systems (MEMS).
Corning IntelliSense Awarded $2 million from NIST Advanced Technology ... by EDP Weekly's IT Monitor
This is just the beginning," says Roukes, who sees the electrometer as a demonstration of what an integrated microelectromechanical system can do (SN: 7/26/97, p.
Timeless machine detects electric charge by Wu, Corinna / Science News
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