micro machining

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micro machining

Making microminiaturized devices using the same manufacturing techniques employed by the semiconductor industry. See MEMS.
References in periodicals archive ?
In materials and manufacturing, miniaturization and micromachinery will be realities.
The Center's capabilities include design and modeling, bulk and surface silicon micromachining, advanced LIGA technology and manufacturing, and "smart" MEMS that combine integrated circuits with micromachinery in a single package using flip chip technology.