chemical vapor deposition
(redirected from Microwave Plasma-assisted CVD)

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chemical vapor deposition [′kem·i·kəl ¦vā·pər ‚dep·ə′zish·ən]

(solid-state physics)

The growth of thin solid films on a crystalline substrate as the result of thermochemical vapor-phase reactions. Abbreviated CVD.

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chemical vapor deposition (redirected from Microwave Plasma-assisted CVD)

chemical vapor deposition
(redirected from Microwave Plasma-assisted CVD)