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(inorganic chemistry)
Sin H2 n +2A class of silicon-based compounds analogous to alkanes, that is, straight-chain, saturated paraffin hydrocarbons; they can be gaseous or liquid. Also known as silicon hydride.



any one of several compounds of silicon with hydrogen that have the general formula SinH2n+n (seeSILICON HYDRIDES).

References in periodicals archive ?
Monosilane is an industrial gas that is used to form silicon films on thin film silicon solar cells and a variety of electronic devices in the semiconductor industry.
The new plant is the very first monosilane facility that Evonik Group will build outside Europe and is expected to contribute significantly to environmental technologies, such as solar power generation.
Dow Corning's monosilane plant has a capacity of 4,000 metric tons per year.
However, the sales markets for monosilanes have changed drastically in Japan since then.
This agreement also demonstrates the strength of our technology based on monosilane, and gives us the confidence to feed the industry's demand for electronic grade silane.
Besides its resistance to microcracking, the DCS Silicide process has other significant benefits over the monosilane (SiH4) silicide process chemistry that has been used for years in semiconductor production.