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chemical vapor deposition |
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chemical vapor deposition [′kem·i·kəl ¦vā·pər ‚dep·ə′zish·ən] (solid-state physics) The growth of thin solid films on a crystalline substrate as the result of thermochemical vapor-phase reactions. Abbreviated CVD. How to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit webmaster's page for free fun content. |
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| Seki Technotron USA announced today the installation and successful commissioning of a new microwave plasma enhanced CVD system for materials research at Purdue University, Lafayette, Indiana. The objective of this project is to assess the performance of a new industrial Low Energy Plasma Enhanced CVD (LEPECVD) tool from Unaxis at ST Microelectronics/LETI in Grenoble. In fabricating the contact structure, a robust layer of CVD TiCl4 Ti is first deposited using the company's Ti-xZ Plasma Enhanced CVD chamber. |
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