plasma etching

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plasma etching [′plaz·mə ′ech·iŋ]

(electronics)

A method of forming integrated-circuit patterns on a surface, in which charged species in a plasma formed above a masked surface are directed to impact the nonmasked regions of the surface and knock out substrate atoms. Also known as dry plasma etching.

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No references found			NIST scientists have recently developed and validated a model for predicting the kinetic energy of ions in plasma etching reactors used by the semiconductor industry. Nist develops accurate model for ion bombardment energies in plasma ... by Journal of Research of the National Institute of Standards and Technology Ideal for semiconductor applications requiring accurate, rapid response temperature measurement (such as plasma etching and the vacuum processing of CVD systems), the product consists of thin film thermocouples sputtered onto an oxide-coated silicon wafer with welded lead wires. Watlow Electric Manufacturing Co by Designfax System Specifically Designed for Plasma Etching Dielectric Films Required in Flexible Electronics Fabrication SAN JOSE, Calif. FlexTech Alliance Awards Contract to Etched in Time for Linear Plasma ... by Business Wire			Planudes, Maximus Planula Planuloidea plaque plaque rail Plaquemine Lock State Historic Site Plaquemines Parish Plaquette plash Plaskett, John Stanley Plaskow, Judith Plasma plasma accelerator Plasma Accelerators plasma arc cutting plasma cathode Plasma Cell plasma centrifuge Plasma Chemistry plasma cloud plasma desorption mass spectrometry plasma diode plasma display Plasma Drilling Plasma Engine plasma etching plasma frequency Plasma Furnace plasma generator plasma gun plasma instability plasma jet plasma mantle Plasma Membrane Plasma Metallurgy plasma oscillations plasma physics plasma pinch plasma processing plasma propulsion plasma radiation Plasma Reactor plasma rocket plasma sheath plasma sheet plasma spraying Plasma Substitute plasma tail plasma thromboplastin antecedent plasma thromboplastin component Plasma Torch			Plasma desorption mass spectrometry Plasma desorption mass spectrometry plasma diode Plasma Discharge Surface Modification Plasma display Plasma display Plasma display panel Plasma display panel Plasma display screen Plasma displays Plasma Dopamine-Beta-Hydroxylase Plasma Doping Plasma Doping Users Group Plasma Drilling Plasma Electrode Pockels Cell Plasma Electron and Current Experiment Plasma Emission Spectrometry Plasma Endorphin-Like Activity plasma engine plasma engine Plasma Enhanced CVD Plasma Enhanced Reactive Ion Etch Plasma Enhanced Tetraethylorthosilicate Plasma Epinephrine Fractional Extraction Plasma Essential Amino Acid Plasma etch Plasma Etch and Strip in Microelectronics Plasma Etch Users Group plasma etching Plasma exchange Plasma exchange Plasma exchange Plasma exchange Plasma exchange Plasma exchange Plasma Exchange or Whole Blood Exchange plasma exchange therapy plasma expander plasma expanders plasma expanders plasma expanders Plasma Experiment for Planetary Exploration Plasma Factor 4 plasma fatty acid profile plasma fibronectin Plasma Flood Gun Plasma Fluid Finite Difference Time Domain Plasma Focus Device Plasma Frag Rocket Plasma Free Amino Acid Plasma frequency Plasma Furnace Plasma Gasification Melting Technology plasma generator Plasma glucose Plasma glucose Plasma glucose Plasma glucose Plasma Glutamic Pyruvic Transaminase

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