Positive resist definition of Positive resist in the Free Online Encyclopedia.

photoresist

A film used in photolithography that temporarily holds the pattern of a circuit path or microscopic element of a chip. When exposed to light, it hardens and is resistant to the acid bath that washes away the unexposed areas. Not to be confused with photoresistor.

photoresist [′fōd·ō·ri‚zist]

(graphic arts)

A light-sensitive coating that is applied to a substrate or board, exposed, and developed prior to chemical etching; the exposed areas serve as a mask for selective etching.

Photoresist

a photosensitive polymer coating applied to the surface of a semiconductor plate with an oxide film. Photoresists are used in semiconductor electronics and microelectronics to produce areas of a specific configuration that permit access of an etching agent onto the plate.

The properties of a photoresist are altered on exposure to ultraviolet light or an electron beam through a glass template of the required configuration applied to the photoresist. Either the solubility of the photoresist is sharply reduced (in the case of a negative photoresist), or the photoresist is decomposed and may be easily removed (in the case of a positive photoresist). Subsequent treatment with a solvent forms the access areas in the nonirradiated segments of a negative photoresist or in the irradiated segments of a positive photoresist. Negative photoresists consist of layers of polyvinyl alcohol with chromates or cinnamic acid esters and layers of cyclized rubber with additives that produce crosslinking of the macromolecules under the action of light. Positive photoresists consist of a phenol-formaldehyde or cresol-formal-dehyde resin with ortho-naphthoquinone diazide.

REFERENCES

Fotolitografiia i optika. Moscow-Berlin, 1974.
Mazel’, E. Z., and F. P. Press. Planarnaia tekhnologiia kremnievykh priborov. Moscow, 1974.

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No references found	Under drying may lead to defects associated with damage during handling and stacking, loss of resist adhesion, and changes in resist exposure and development properties (such as excessive photospeed or formation of a negative or positive resist foot). Troubleshooting the innerlayer process: identifying and maintaining ... by Xie, Betty; Lee, Simon / Printed Circuit Design & Fab	positive ion positive landform Positive Law positive lens positive linear functional Positive Logic positive meniscus lens positive mirror positive modulation positive mold positive motion positive movement positive number positive ore Positive Organ positive part positive pedal curve positive phase sequence positive photokinesis positive phototaxis positive pole Positive Process positive ray positive real function Positive Relief form Positive resist positive semidefinite positive series positive shoreline positive sign positive skewness positive temperature coefficient positive terminal positive transfer positive transmission positive vetting positive with respect to a signed measure positive zero positive-displacement positive-displacement compressor Positive-Displacement Hydraulic Drive positive-displacement meter positive-displacement pump positive-grid oscillator positive-ion sheath positive-phase-sequence relay Positivism Positron positron camera positron depth profiling positron emission	Positive pressure ventilation Positive Process Positive Psychology Center Positive Psychology News Daily Positive punishment Positive punishment Positive punishment Positive punishment Positive Puppy Training Works Positive Quadrant Dependence Positive quantity Positive Quantum Energy Positive ray positive real function Positive Reassuring Action Yielding Eternal Results Positive Refractive Index Positive Regulatory Domain I-Binding Factor 1 Positive reinforcement Positive reinforcement Positive reinforcement Positive reinforcement Positive Reinforcement Training positive reinforcer positive reinforcer positive reinforcer positive reinforcer positive reinforcing stimulus Positive relationship Positive Relief form Positive Research Center Positive resist Positive Result Likelihood Ratio Positive Reward-Based Training Positive right Positive right Positive right Positive right Positive right Positive Rolandic Sharp Waves Positive roots Positive rotation Positive Sample Only Learning Positive Samsonite Sign positive scotoma positive scotoma positive scotoma Positive Semi-Definite Hermitian Positive semidefinite Positive sense virus Positive sense virus positive sequence Positive Sequence Load Flow positive series positive sharp wave positive sharp wave positive sharp wave positive sharp wave positive sharp wave positive sharp wave positive shoreline Positive sign

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Under drying may lead to defects associated with damage during handling and stacking, loss of resist adhesion, and changes in resist exposure and development properties (such as excessive photospeed or formation of a negative or positive resist foot).

Troubleshooting the innerlayer process: identifying and maintaining ... by Xie, Betty; Lee, Simon / Printed Circuit Design & Fab

positive linear functional

Positive Logic

positive meniscus lens