Rutherford backscattering spectrometry

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Rutherford backscattering spectrometry [′rəth·ər·fərd ′bak‚skad·ə·riŋ spek′träm·ə·trē]

(spectroscopy)

A method of determining the concentrations of various elements as a function of depth beneath the surface of a sample, by measuring the energy spectrum of ions which are backscattered out of a beam directed at the surface.

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