Rutherford backscattering spectrometry


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Rutherford backscattering spectrometry

[′rəth·ər·fərd ′bak‚skad·ə·riŋ spek′träm·ə·trē]
(spectroscopy)
A method of determining the concentrations of various elements as a function of depth beneath the surface of a sample, by measuring the energy spectrum of ions which are backscattered out of a beam directed at the surface.
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