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SECS/GEM

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(SEMI Equipment Communications Standard/Generic Equipment Model) Communications protocols between a host computer and semiconductor manufacturing equipment. SECS is a layer 6 protocol that describes the content of the messages while GEM is a higher layer application protocol that defines the messages themselves. SECS/GEM is used to control wafer steppers, lithographic equipment, etchers, ion implanters and other machines.



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It complies fully with 200 mm and 300 mm software and hardware standards, including SECS/GEM and AMHS (Automatic Material Handling System).
PHILIPS CHARACTERIZES THE NEW MATERIALS FOR SEMICONDUCTORS AT SEMICON ... by EDP Weekly's IT Monitor
The Endeavor AT has an easy-to-use GUI, SECS/GEM communication, reliable low-contact wafer handling and flexible wafer shape and size capability, that makes it ideal for ultra-clean production environments for both front-side and back-side applications.
Tegal Receives Repeat PVD Production System Order From US Customer by Business Wire
The 6500 system has an easy-to-use GUI, SECS/GEM communication and flexible wafer shape and size handling capability that makes it ideal for production environments.
Tegal Receives Order for 6500 Advanced Etch System From Skyworks ... by Business Wire
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