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scatterometer
(redirected from Scatterometry)

    Also found in: Wikipedia 0.01 sec.
scatterometer [‚skad·ə′räm·əd·ər]
(engineering)
A microwave sensor that is essentially a radar without ranging circuits, used to measure only the reflection or scattering coefficient while scanning the surface of the earth from an aircraft or a satellite.
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Current measurement methods such as scanning electron microscopy, atomic force microscopy, and optical scatterometry, face significant challenges in the characterization of dense, high aspect ratio, nanoscale features because, in general, smaller structures are increasingly difficult to measure.
NIST develops high-resolution technique for characterization of ... by Journal of Research of the National Institute of Standards and Technology
salinity, temperature), currents (using ADCP), sediment resuspension (using OBS), and particle size distribution of the sediment in suspension (using Laser Scatterometry, LISST) with the water sampling for chemical analyses.
Transport and flux of suspended sediment in a partially-mixed ... by Kim, Yong Hoon / Bulletin of the South Carolina Academy of Science
The InSight 3DAFM tool will address this concern and will be used as part of our overall CD metrology strategy to provide reference metrology for CD-SEMs and scatterometry.
Veeco's InSight 3DAFM Receives Acceptance from SEMATECH by Business Wire
 
 
 
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