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tantalum pentoxide |
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5-V power supply voltage and 100-[eth]-A current using tantalum pentoxide for the interfacial layer. A second application of Applied Materials ALD technology is for TiN films used in tantalum pentoxide capacitors. introduces the Giga-Cap(TM) TanOx(TM) Centura(R), a high-productivity system for the deposition of high k tantalum pentoxide (Ta2O5) dielectric films in advanced DRAMs. |
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