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x-ray lithography |
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x-ray lithography [′eks ‚rā li′thäg·rə·fē] (electronics) Lithography in which the resist is exposed to a well-collimated, high-intensity x-ray beam projected through a special mask in close proximity to the silicon slice. How to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit webmaster's page for free fun content. |
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| The MIT group used a technique called X-ray lithography, which is not yet widespread in industry (SN: 11/8/97, p. The review is held annually to demonstrate the accomplishments of the collective JMAR divisions on tasks ranging from x-ray lithography and x-ray point source systems, to advanced inspection methods and materials development. X-ray lithography has been under development even longer than EUV technology. |
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