In this hybrid design, individual axes can be customised to provide travel ranges from millimetres to over one metre, while maintaining nanometre levels of precision--it can achieve less than 100nm 3D six-axis point precision repeatability, according to Alio.
Certain features in these patterns can be as thin as 50 nanometres. But the process is becoming prohibitively expensive as scientists try to make even smaller features with more finely focused light.
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