octafluorocyclobutane
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octafluorocyclobutane
[¦äk·tə¦flu̇r·ō‚sī·klō′byü‚tān] (organic chemistry)
C4F8 A colorless gas or liquid with a boiling point of -4°C and a freezing point of -41.4°C; soluble in ether; used as a dielectric, refrigerant, and aerosol propellant.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
References in periodicals archive
Alternatively, we tried a pseudo gas-chopping approach with a plasma chemistry based on
octafluorocyclobutane and sulfur hexaflouride ([C.sub.4][F.sub.8]/S[F.sub.6]).
DRIE involves a cyclical bombardment of chemical species (in this case, sulfur hexafluoride, SF6, and
octafluorocyclobutane, C4F8).
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