Figure 7 shows the optical microscopic photographs of the lithographic images after
reactive ion etching. These patterns still remained clear and intact.
Another way to effectively increase resist thickness while using heavier ions is to move away from traditional resist exposure and take advantage of ion implantation effects that can produce a negative resist pattern if developed by
reactive ion etching [61-63].
Furthermore, W/O/W and O/W/O double emulsions were generated using pattern wettability to reflect its efficiency [7].To the best of the author's knowledge, there are minimal studies been done towards the relationships between the process parameters and the wettability effect, hence this paper studies the relationship between controllable process parameters and wetability of the etched Platinum metallization layer after
Reactive Ion Etching (RIE).
For example,
reactive ion etching (RIE) [7] is one of the candidates for texturing mc-Si cells and can enhance cell efficiency sufficiently.
In addition, the following devices were introduced in form of posters: Vibrating Sample Magnetometer (VSM), Freeze Drying, Plasma-Enhanced Chemical Vapor Deposition (PECVD), Animal Spectrometer, Deep
Reactive Ion Etching and Deep Silicon Etching, Electrospinning, Pulse Electrical Explosion (PEE), Producer of PNC and FMI Metallic Nano Colloids, and High Pressure.
These polymer films acted as protective layers for Au substrate or silicon wafers in the subsequent chemical wet etching or
reactive ion etching process.
The researchers have already manufactured a 4-millimeter-diameter radial inflow turbine wheel from silicon using deep
reactive ion etching - a relatively new micro-fabrication method, according to Epstein.
The five new achievements were a device to determine specific area (BET) of nanomaterials with the ability to characterize nanostructured materials, deep
reactive ion etching (DRIE) device with the ability to create vertical and deep micrometric and nanometric structures, capillary electrophoresis device with the ability to quantitatively and qualitatively detect medicine, animal spectroscopy device (HiReSPECT) with the ability to take images from small animals, and Sinadoxosome nanomedicine.