"*1914, from meta- "transcending, overarching, dealing with the most fundamental matters of + analysis.
[...] misinterpretation of metaphysics as "science of that which transcends the physical." This has led to a prodigious erroneous extension in modern usage, with meta- affixed to the names of other sciences and disciplines, especially in the academic jargon of literary criticism.
(1) One may wonder why meta- is frequent in modern technical languages, and one of the usual suspects may be Tarski who had a problem with specific truth conditions, so he suggested that (according to SEP):