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batch-type furnace

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batch-type furnace [′bach ‚tīp ′fər·nəs]
(mechanical engineering)
A furnace used for heat treatment of materials, with or without direct firing; loading and unloading operations are carried out through a single door or slot.


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The technology offers key advantages over traditional batch-type furnaces for several applications including implant anneal and metal silicide formation.
With its nitric oxide process technology, the RTP Centura moves beyond RTP's traditional applications to further expand into the large thermal annealing and oxidation market historically served by batch-type furnaces.
Sass Somekh, Applied Materials' senior vice president of worldwide product operations, said, "The enabling technology of this RTP Centura system gives our customers a critical set of high-temperature, single-wafer processes that ultimately should replace many of the batch-type furnace systems historically used in annealing and doping.
 
 
 
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