batch-type furnace

batch-type furnace

[′bach ‚tīp ′fər·nəs]
(mechanical engineering)
A furnace used for heat treatment of materials, with or without direct firing; loading and unloading operations are carried out through a single door or slot.
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Sass Somekh, Applied Materials' senior vice president of worldwide product operations, said, "The enabling technology of this RTP Centura system gives our customers a critical set of high-temperature, single-wafer processes that ultimately should replace many of the batch-type furnace systems historically used in annealing and doping.
The technology offers key advantages over traditional batch-type furnaces for several applications including implant anneal and metal silicide formation.
Compared to traditional batch-type furnaces, this single-wafer technology incorporates nitrogen into the gate oxide with a reduced thermal budget, thereby enabling the accurate and repeatable results necessary for deep submicron transistor formation.