cryopump


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cryopump

[′krī·ō‚pəmp]
(cryogenics)
References in periodicals archive ?
Cryogenic pump manufacturers and service providers Cryopump AG and Cryopump GmbH, sister companies of U.
prior to the merger of the two companies, Dan was responsible for Eastern US IC manufacturers as well as managing independent rep firms primarily selling cryopump and gauging solutions to IC OEMs, vacuum coater industry, as well as University R&D programs.
Pumps and Valves: A cryopump with an intake capacity for N2 of 3000 liters / second (l / s) (UHV version), including a compressor, helium-Flex Line assembly (10 m long), a regeneration kit, baffle, a LN2 cooling for operation during bake-out and a 300 mm pneumatic valve.
The ArchestrA application platform has been selected by International Sematech Manufacturing Initiative as the host system for validation of equipment data acquisition (EDA) interfaces on process tools and has been adopted by a major memory chipmaker for wet-etch monitoring, particle count monitoring and cryopump management.
Compressors supply in parallel several cryocoolers; each cryopump itself comprises a variable number of heads.
It has a length of 725 mm, and is a large area coated with copper, so that the entire chamber by active cooling with a helium-tube acts as an extended cryopump.
CTIT) announced today that its Energy and Chemicals Group has closed on the transaction to sell its cryopump product line to PHPK Technologies Incorporated (PHPK).
Since the inner walls of the tube chambers are also act as effective cryopump each chamber additionally has a cooling circuit which is maintained in the form of small cooling pipes on the outer periphery of the elliptic tube along.
Brooks' CTI-Cryogenics(R) On-Board IS(R) 8F XP cryopump has been optimized for next generation PVD processes and offers over 40% improvement of mixed gas capacity.
Helix Technology Corporation (Nasdaq: HELX) CTI-Cryogenics division, today launched its On-Board(R) IS Cryopump product line for semiconductor process tool applications.
In addition, our vacuum cryopump continued its market-leading performance with 3 new design-in wins at Asian fabs for ion
Specifically, Ebara Technologies manufactures a full line of dry mechanical, cryopump systems and associated monitoring systems for the semiconductor industry's toughest applications, including low pressure chemical vapor deposition (LPCVD), etch, epi and CVD.