depth of focus


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depth of focus

[¦depth əv ′fō·kəs]
(optics)
The range of image distances corresponding to the range of object distances included in depth of field.
References in periodicals archive ?
The limitations on the depth of focus have existed ever since the first optical microscope was created.
It had a 6-km depth of focus and was tectonic in origin.
This significant advance in lithography provides increased depth of focus and improved image fidelity that can improve chip-level performance and manufacturing efficiency.
PhiVolcs said that it had a depth of focus of 78 km.
Extended Focus Imaging software provides greater depth of focus at high magnifications, while high accuracy staging ensures accurate defect relocation.
30 NA lens provides the optimal resolution and depth of focus for 45 nm memory structures.
With its high intensity illumination and high intensity optics the MA200Compact features a complete suppression of stray light effects, and a very large depth of focus, which yields excellent results even with high topography wafers.
For example, because PicoP is using a collimated beam of laser light to produce a full-color, high resolution and contrast image it exhibits an "infinite" depth of focus.
ASML disclosed TWINSCAN XT:1700i images of record resolution of 42-nm dense lines at a 84-nm pitch with a depth of focus of 1 micron at a field size of 26x33-millimeter (mm2).