depth of focus


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depth of focus

[¦depth əv ′fō·kəs]
(optics)
The range of image distances corresponding to the range of object distances included in depth of field.
References in periodicals archive ?
These modules include a newly developed lens module with a maximum depth of focus of 500 om, a 30-stage auto mask changer, and a specially designed wafer transfer module that can handle warped wafers and special substrates.
The surface of the Crystalens HD has been shaped to enhance the depth of focus with a proprietary optical modification.
The depth of focus of the MAHE Pediatric Nasopharyngoscope remains at 3 mm to infinity; however, the length of the movable tip has been increased to 30 mm.
Studies by leading lithography system suppliers have shown that slight variations in wafer flatness can consume as much as 50% of the critical lithography depth of focus budget at 45nm.
This significant advance in lithography provides increased depth of focus and improved image fidelity that can improve chip-level performance and manufacturing efficiency.
The SEM's increased depth of focus and monochromatic electron beam scanning proved to deliver images that revealed a rich depth of information about the gun.
Extended Focus Imaging software provides greater depth of focus at high magnifications, while high accuracy staging ensures accurate defect relocation.
30 NA lens provides the optimal resolution and depth of focus for 45 nm memory structures.