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dielectric curing

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dielectric curing [‚dī·ə′lek·trik ′kyu̇r·iŋ]
(engineering)
A process for curing a thermosetting resin by subjecting it to a high-frequency electric charge.


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Our proprietary source technology in combination with Axcelis' in-house bulb development and manufacturing capabilities opens up an exciting range of possibilities - not only for tailoring our light source technology to specific charge erasure needs, but also for emerging applications such as low-k dielectric curing, stress modification of SiN and transistor annealing applications.
 
 
 
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