Dry plasma etching | Article about dry plasma etching by The Free Dictionary
dry plasma etching
dry plasma etching[¦drī ′plaz·mə]
dry plasma etchingA method for inscribing a pattern on a wafer by shooting hot ions through a mask to evaporate the silicon dioxide insulation layer. Dry plasma etching replaces the wet processing method that uses film and acid for developing the pattern.
References in periodicals archive
Tenders Are Invited for Supply, installation and implementation of an ICP-RIE system for dry plasma etching of various materials for the nanofabrication of ICN2 laboratory.
Lot 1: supply, installation and implementation of an ICP-RIE system for dry plasma etching
An innovator of advanced wafer-thinning processes and applications, Tru-Si will utilize its processing knowledge and proprietary equipment for dry plasma etching
to produce silicon wafers that are thinned to 100 microns or less.