electron beam lithography

Also found in: Acronyms, Wikipedia

0.01 sec.

Using electron beams to create the mask patterns directly on a chip. The wavelength of an electron beam is only a few picometers compared to the 248 to 365 nanometer wavelengths of light used to create the traditional photomasks.

Magnified 35,000 Times

The tiny lines on this silicon wafer were created using Lucent's SCALPEL electron beam lithography. The right-leaning lines are .08 microns wide. It would take 1,250 of them to equal the width of one human hair. (Image courtesy of Lucent Technologies.)

How to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit webmaster's page for free fun content.

?Page tools

Printer friendly
Cite / link

Feedback

Mentioned in	?		References in periodicals archive	?		Encyclopedia browser	?		Full browser	?
No references found			It covers system overview of optical steppers and scanners, optical lithography modeling, optics for photolithography, excimer laser for advanced microlithography, alignment and overlay, electron beam lithography systems, x-ray lithography, extreme ultraviolet lithography, and imprint lithography. Microlithography; science and technology, 2d ed by SciTech Book News The apparatus is easily handled by anyone, and enables nanometer-scale fabrication at low cost, which until now could only be done with expensive large apparatus using short wavelength light, such as vacuum ultraviolet light (for the photolithography method) and electron beams (for the electron beam lithography method). National Institute of Advanced Industrial Science and Technology ... by JCNN News Summaries RSC's Electron Beam Lithography Team is staffed by highly trained professionals with decades of experience covering a wide range of EBL applications. ROCKWELL LAUNCHES ELECTRON BEAM LITHOGRAPHIC SERVICES by Electro Manufacturing			Electromechanical Transducer electromechanics Electrometallurgy Electrometer electrometer amplifier Electrometer Tube electromigration electromodulation electromotance electromotive Electromotive Force Electromotive Force Series electromotive series electromyogram electromyograph Electromyography Electron electron accelerator electron acceptor Electron Affinity Electron and Ion Optics electron attachment electron avalanche electron beam electron beam imaging electron beam lithography electron bunching Electron Capture electron carrier electron charge electron cloud electron collector electron compound electron conduction electron configuration electron cooling electron correlation electron coupler electron coupling electron cyclotron resonance electron cyclotron resonance ion source electron cyclotron resonance reactor electron cyclotron resonance source electron cyclotron wave electron density Electron Device electron diffraction Electron Diffraction Analysis Electron Diffraction Apparatus electron diffraction camera electron diffractograph			electron beam electron beam electron beam electron beam Electron Beam Accelerator Electron Beam Assisted Deposition Electron Beam Cold Hearth Refining Electron Beam Computed Tomographic Angiography Electron Beam Computed Tomography Electron Beam Computed Tomography Electron Beam Computed Tomography Electron Beam Computed Tomography Electron Beam Computed Tomography Electron Beam Controlled Evaporation Electron Beam Cutting Electron Beam Dry Scrubbing Electron Beam Electro-Reflectance Electron beam evaporation Electron Beam Food Research Facility Electron Beam Free Form Fabrication Electron Beam Freeform Fabrication Electron Beam Gun Electron Beam Hardening Treatment Electron beam imaging Electron beam imaging Electron Beam Imaging System Electron Beam Induced Conductivity Electron beam induced current Electron Beam Ion Source Electron beam ion trap electron beam lithography Electron Beam Machining Electron Beam Melted Electron beam melting Electron Beam Micro-Fabricator Electron Beam Microprobe Analysis Electron Beam Pattern Generator Electron beam physical vapor deposition Electron Beam Position Monitor Electron Beam Projection System Electron beam tomography Electron beam tomography Electron Beam Welder Electron beam welding Electron Beam-Induced Deposition Electron Beam/Bombarded Semiconductor electron beams electron beams Electron Bernstein Wave Electron Bernstein Wave Current Drive Electron binding energy Electron Blue Pearl Electron Bombarded Active Pixel Sensor Electron Bombarded Silicon Electron Bombarded Silicon - Charge Coupled Device Electron Bombardment Induced Conductivity electron bunching

Encyclopedia

Free Tools:	For surfers: Free toolbar & extensions \| Word of the Day \| Help For webmasters: Free content \| Linking \| Lookup box \| Double-click lookup \| Partner with us

Disclaimer
All content on this website, including dictionary, thesaurus, literature, geography, and other reference data is for informational purposes only. This information should not be considered complete, up to date, and is not intended to be used in place of a visit, consultation, or advice of a legal, medical, or any other professional.