electron-beam lithography

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electron-beam lithography [i′lek‚trän ‚bēm li′thäg·rə·fē]

(electronics)

Lithography in which the radiation-sensitive film or resist is placed in the vacuum chamber of a scanning-beam electron microscope and exposed by an electron beam under digital computer control; after exposure, the film is removed from the vacuum chamber for conventional development and other production processes.

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No references found			In the past, all individual samples of RM 8090 or SRM 2090 were made by direct write electron-beam lithography, because optical lithography did not have the required resolution. New photomask designed for SEM magnification calibration. (News ... by Journal of Research of the National Institute of Standards and Technology The following technologies are covered in this research: - Optical lithography - Maskless lithography - Electron-beam lithography - X-ray lithography - Nanoimprint lithography The Semiconductor Industry is facing the limits of Photolithography and the Emergence of Next Generation Technologies In the last two decades, novel lithographic technologies have been introduced and evaluated for its capacity to meet challenging technological requirements, production throughput and cost-effectiveness. Global Semiconductor Industry Faces the Limits of Photolithography ... by Business Wire			electron transfer electron transition electron transport system electron trap electron tube electron tunneling electron vacuum gage Electron Volt electron voltaic effect Electron wake electron wave electron wave function electron wavelength Electron, Conduction electron-acoustic microscopy electron-beam channeling electron-beam cutting electron-beam drilling Electron-Beam Furnace electron-beam fusion electron-beam generator Electron-Beam Instruments electron-beam ion source electron-beam ion trap electron-beam laser electron-beam lithography electron-beam machining electron-beam magnetometer Electron-Beam Melting electron-beam memory electron-beam parametric amplifier electron-beam pumping electron-beam recorder electron-beam tube electron-beam welding electron-beam-accessed memory electron-bombardment-induced conductivity electron-capture detector electron-coupled oscillator electron-dot formula electron-electron double resonance electron-gun density multiplication electron-hole droplets Electron-Hole Liquid electron-hole recombination Electron-Inertia Experiments electron-multiplier phototube electron-positron pair Electron-positron pair production electron-positron storage ring electron-ray indicator			electron volt electron volt electron volt electron volt (eV) electron volt (eV) electron volt (eV) electron voltaic effect Electron volts Electron volts Electron wake electron wave electron wave function electron wavelength Electron, Conduction electron, scanning microscope electron, scanning microscope electron, scanning microscope electron-acoustic microscopy Electron-Assisted Chemical Vapor Deposition electron-beam channeling Electron-Beam Cold-Wire Feed electron-beam cutting electron-beam drilling Electron-Beam Furnace electron-beam fusion electron-beam generator Electron-Beam Instruments electron-beam ion source electron-beam ion trap electron-beam laser electron-beam lithography electron-beam machining electron-beam magnetometer Electron-beam melting electron-beam memory electron-beam parametric amplifier electron-beam pumping electron-beam recorder Electron-Beam Recording electron-beam tube electron-beam welding electron-beam-accessed memory Electron-Beam-Addressable Memory Electron-Beam-Excited Plasma Electron-Beam-Induced Voltage Electron-Bombarded Charge-Coupled Device electron-bombardment-induced conductivity Electron-capture Electron-capture Electron-capture electron-capture detector Electron-Capture Negative-Ion Electron-Coupled Oscillator Electron-Coupled Oscillator Electron-Crystal Phonon-Glass electron-dense Electron-Dense Crystalline Body Electron-Dense Intramembranous Deposit

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