The dry plasma etch
process gives very high silicon etch
rates, high mask selectivities for resist and oxide masks, good etch
uniformity, and vertical anisotropic etch
The 6500 etch
system is a state-of the-art, high-vacuum etch
cluster tool and is used in production fabs to etch
multiple thin films in an extremely clean process environment.
A single Marathon 8600 system can reduce cost of ownership for etch
customers by more than 50% over conventional abatement methods.
Hitachi's XT etch
chamber is proving an ideal platform for high-k and metal etch
as it is able to perform low-pressure, room temperature etch
, which is particularly effective in avoiding time-dependent dielectric breakdown (TDDB).
Unaxis Wafer Processing offers innovative production solutions for deposition and etch
Aviza's Omega fxP plasma etch
system can be configured with up to six process modules to address a variety of applications.
With over 90 chambers already shipped to customers, the rapid industry acceptance of this new system is helping us make a major impact in the etch
marketplace, where the shift to advanced production and next-generation development has shown the severe limitations of etchers that use older technology.
Tegal is the leading company in plasma etch
technology for several types of non-volatile memory devices, such as FeRAM, MRAM, RRAM and polymeric memories," said Murali Narasimhan, Tegal's recently appointed Vice President of Marketing.
Popular applications include silicon nitride and oxide dielectric etch
in addition to a wide variety of polymer etch
Dennis, senior vice president and general manager of Applied Materials' Etch
and Front End Products Groups.
The Dimension AFP is the world's only AFM single-tool fab solution, designed for both CMP and etch
metrology at 65nm," stated Jeannine Sargent, Executive Vice President, Veeco Metrology & Instrumentation.
Tegal is committed to ongoing support and continuous improvement of our large installed base of etch
equipment in Japan," said Paul Werbaneth, General Manager of Tegal Japan, Inc.