Assessment of EUV resist readiness for 32 nm half-pitch manufacturing and extendibility
study of EUV ADT using state-of-the-art resists - will assess EUVL resist readiness for 32 nm half-pitch manufacturability using a full-field ADT scanner and demonstrate ADT extendibility
with state-of-the-art EUV resists.
Designed to optimize productivity for leading-edge 200mm and 300mm AP applications, the AP200 and AP300 systems integrate the processing advantages associated with Ultratech's industry-leading AP lithography equipment with the flexibility, extendibility
, and 20 percent higher throughput benefits of the company's new Unity Platform(TM).
The Optima HD incorporates our propriety spot beam technology, which because of its short, simple beam delivers greater productivity, higher yield and unmatched extendibility
Companies manufacturing components and consumables for use in semiconductor process and test equipment, not surprisingly, are driven by the same concerns regarding their products' cost-of-ownership (CoO), reliability and extendibility
as their customers-the process equipment manufacturers.
The FSA product offers excellent mechanical and electrical performance along with the design flexibility and technology extendibility
needed for Seagate's industry leading disk drive applications," he added.
Due to Celsior's flexible platform and advanced systems capabilities, the current ALD system will be used for 200-mm/300-mm bridge application thus offering the flexibility and extendibility
that is key to meeting customers' multiple generation production needs.
300 mm Metallization System Delivers PVD Extendibility
The company considers EUV as the most attractive technology for 32 nm and beyond, because of its potential to be the most cost effective technology and its extendibility
to multiple nodes.