feature size

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feature size

The size of the elements on a chip, which is designated by the "DRAM half pitch." The smallest feature size is generally smaller than the feature size for a technology generation (technology node). For example, the 180 nm technology generation will have gate lengths smaller than 180 nm. See DRAM half pitch and process technology.

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chip
DRAM half pitch
feature width

Moore's law
process technology

This is also achieved without reducing the feature size of LSI (5*).

NEC, National Institute for Materials Science, and Japan Science and ... by JCN Newswires

The smallest achievable feature size of the patterns is proportional to the wavelength of the light used to expose the mask.

High accuracy ultraviolet index of refraction measurements using a ... by Kaplan, Simon G. / Journal of Research of the National Institute of Standards and Technology

A particular technical challenge will be to make magnetic recording heads with track width dimensions that are smaller than the minimum feature size of the optical lithographic equipment used in the semiconductor industry.

Advanced storage roadmap by Moore, Fred / Computer Technology Review

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