The product lifetime of both the VisionPad 3200 and VisionPad 3500 is similar to a traditional hard pad
and surpasses that of a traditional soft pad.
Additionally, WIN[TM] W7300 has been used very successfully as a "buff" on a hard pad
using the same platen.
The VisionPad VP3100 polishing pad's proprietary polyurethane formulation provides a softer surface than a traditional hard pad
to reduce defects while maintaining the rigidity needed to deliver good planarization during CMP in copper barrier processes.
They don't mind the spiny leaves because they have hard pads
on the roofs of their mouths for protection.
W & M designed the grippers with floating centers instead of hard pads
The lifetime of the EcoVision 4000 pad demonstrates a significant improvement over existing soft pads for copper barrier applications and is comparable to hard pads
such as the industry-standard IC1000[TM] pad, used for bulk copper removal CMP applications.