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hexode

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hexode [′hek‚sōd]
(electronics)
A six-electrode electron tube containing an anode, a cathode, a control electrode, and three additional electrodes that are ordinarily grids.


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Specifically, Tylan General's MFCs will be used on the Centura Silicon Hexode Oxide Etch, Dielectric Chemical Vapor Deposition and High Temperature Film chambers.
 
 
 
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