high etch

high etch

[′hī ¦ech]
(graphic arts)
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High concentrations can lead to high etch depth and undesired galvanic corrosion.
In this regime the flow of reactive neutrals dominates over diffusion with the resulting high etch rates.
The Apollo from Trion Technology is a stripping system with ICP RF bias on the sample and an optional electrostatic chuck that provides runs at low power levels to achieve high etch rates, uniform etches, and low damage to the wafer.
The ability to etch sufficient amounts to provide a good solderable surface no longer needs to be compromised by localized high etch rates.
A high etch rate can increase the throughput significantly, thereby decreasing the cost of ownership of the system.
A high etch rate of 6 mu m/min gives a high throughput for this application.
3~), to achieve a high etch rate, while operating at a low (1-20 mtorr) pressure.

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