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The process uses Novellus' production-proven INOVA platform with patented Hollow Cathode
Magnetron (HCM) technology to produce highly-conformal copper seed films that are four times thinner than the conventional PVD seed approaches used for TSV applications.
About 10 percent of the propellant carried into space on satellites that use an electric propulsion system is essentially wasted in the hollow cathode
that is part of the system," said Mitchell Walker, an assistant professor in Georgia Tech's School of Aerospace Engineering and the project's principal investigator.
They used the NIST 10 m vacuum spectrometer to record the spectra, which were calibrated by spectral lines from a platinum hollow cathode
lamps (HCLs) occupy a unique place in the analytical instrument aftermarket.
In order to cope with this urgent issue, scientists in Japan have adopted optical diagnostics using the Stark effect, which is sensitive to local electric fields, to the IECF device with a hollow cathode
The PinAAcle series' performance is enhanced when used with PerkinElmer Lumina[TM] hollow cathode
lamps and patented graphite tubes.
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The topics include a band energy structure arrangement for organic solar cells with metalized deoxyribonucleic acid strands on an anode electrode, the large-scale deposition of transparent conducting oxides by hollow cathode
sputtering, the cost effective fabrication of wafer scale nanoholes for solar cells applications, pushing the material boundaries in sliver solar cell technology, and a comparative study of the manufacturability of selective emitter and double printing on mono-silicon photovoltaic cells.
July 13 /PRNewswire-FirstCall/ -- Novellus Systems announced today that it has developed an advanced Hollow Cathode
Magnetron (HCMA') IONX(TM) PVD copper seed process that will enable copper interconnects below the 2xnm technology node.
The Fraunhofer FEP developed the plasma technology and key components, while Vacuum Technology Dresden (VTD) GmbH provided the hollow cathode
as a plasma source and the ISA GmbH equipped the team with the power supply system.
Under this new program, laboratories are invited to return used hollow cathode
lamps for recycling.