The proprietary Helix detector technology, introduced with the instrument, combines magnetic
immersion lens and low-vacuum SEM technologies.
The Kratos AXIS Ultra, for example, uses its magnetic
immersion lens as part of the charge neutralization system.
Contract awarded for (1) Fabricate aplanatic solid
immersion lens and (2) Fabricate imaging target of integrated circuits.
Microscope high power with oil
immersion lens moveable stage and condenser for the routine microscope erode
A magneto-optical approach based on near-field optical recording they are working on uses a small high-index, solid
immersion lens mounted on a slider head that flies above the media.
Immersion lens FESEMs allow ultrahigh resolution views of LOCOS (local oxidation of silicon) structures and the bottoms of high aspect ratio contact holes.