Significant differences exist between the dual aperture and single aperture interferometer systems.
The two primary systems for linear displacement and volumetric calibration of machine tools and CMMs include the dual aperture laser interferometer system and the single aperture interferometer system.
The dual aperture laser interferometer system is based on the Michelson interferometer.
Zygo Corporation (NASDAQ:ZIGO), Zygo Corporation's European Joint Venture, ZygoLOT GmbH, received an order for ZMI Displacement Measuring Interferometer systems from Carl Zeiss of Oberkochen, Germany, for use in its leading-edge manufacturing equipment.
Arno Kohler, Managing Director of ZygoLOT GmbH, commented, "This order further validates that Zygo's ZMI Displacement Measuring Interferometer systems provide the performance advantages required by customers in leading-edge stage metrology applications.