ion microprobe mass spectrometer

ion microprobe mass spectrometer

[′ī‚än ′mī·krə‚prōb ¦mas spek′träm·əd·ər]
(engineering)
A type of secondary ion mass spectrometer in which primary ions are focused on a spot 1-2 micrometers in diameter, mass-charge separation of secondary ions is carried out by a double focusing mass spectrometer or spectrograph, and a magnified image of elemental or isotopic distributions on the sample surface is produced using synchronous scanning of the primary ion beam and an oscilloscope.