ion microprobe mass spectrometer

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ion microprobe mass spectrometer [′ī‚än ′mī·krə‚prōb ¦mas spek′träm·əd·ər]

(engineering)

A type of secondary ion mass spectrometer in which primary ions are focused on a spot 1-2 micrometers in diameter, mass-charge separation of secondary ions is carried out by a double focusing mass spectrometer or spectrograph, and a magnified image of elemental or isotopic distributions on the sample surface is produced using synchronous scanning of the primary ion beam and an oscilloscope.

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