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micro-electro-mechanical system |
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micro-electro-mechanical system [¦mī·krōi‚lek·trə·mə′kan·ə·kəl ‚sis·təm]
(engineering) A system in which micromechanisms are coupled with microelectronics, most commonly fabricated as microsensors or microactuators. Abbreviated MEMS. Also known as microsystem. Want to thank TFD for its existence? Tell a friend about us, add a link to this page, add the site to iGoogle, or visit the webmaster's page for free fun content. |
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