The text covers the fundamentals and underlying concepts of the field, using a variety of practical system examples adopting optomechatronic principles, including discussion of optics, machine vision, fundamentals of mechatronics, feedback control, and some application aspects of micro-opto-electro-mechanical system
Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems
He covers electro-optics; acousto-optics, optical computing, and signal processing; fiber-optic sensors; integrated optics; optical diagnostics and imaging; and micro-electro-mechanical and micro-opto-electro-mechanical systems
and nano- and bio-nano-technologies.
Abstract: A large format micro-opto-electro-mechanical systems
(MOEMS) array known as the Microshutter Array (MSA).
Lab4MEMS II focuses on Micro-Opto-Electro-Mechanical Systems
(MOEMS) that merge MEMS1 with Micro-optics to sense or manipulate optical signals using integrated mechanical, optical, and electrical systems, while the original project maintains its emphasis on developing a pilot line for next-generation MEMS devices augmented with such advanced technologies as piezoelectric or magnetic materials and 3D packaging.