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microactuator

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microactuator [‚mī·krō′ak·chə‚wād·ər]
(engineering)
A very small actuator, with physical dimensions in the submicrometer to millimeter range, generally batch-fabricated from silicon wafers.


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INTRODUCTION High-aspect-ratio-microstructures (HARMs) can be found in many applications, such as microsensors, microactuators, and high throughput microfluidic systems [1].
MEMS is an enabling technology that facilitates the development of smart products and augments the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators.
[ILLUSTRATION OMITTED] Sergiy Minko, the Egon Matijevic Chaired Professor at Clarkson University, investigates the wetting, permeability, adhesion, and friction properties of smart coatings with potential applications as sensors, membranes, textiles, protective cloth, controlled-release devices, microactuators, and antifouling coatings.
 
 
 
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